| ABSTRACT
As technology continues its evolution towards ever smaller
and faster design profiles there has been great interest over the last decade
or so in the physics and engineering associated with nanotechnology. Improved
nanofabrication techniques have produced a vast array of new technologies including
advanced integrated circuits, medical devices, sensors, information processing
and many more. But as we push the design limits to smaller and smaller length
scales it becomes difficult to resolve and control processes via traditional
means such as electron beam lithography. An alternative method of nanofabrication
via anodic oxidation of aluminum has gained much attention in recent years
due to the natural self-assemblage of complex, ordered nanoporus aluminum oxide
inherent to the anodization process.
Anodized aluminum has been an integral
component to aerospace and consumer based industries for over half a century;
and the anodization process, resulting in a thin amorphous layer of hard, corrosion
resistant oxide called alumina, is applicable over a broad range of experimental
conditions. However under the right conditions, the resulting oxide forms a
self-ordered array of uniform cylindrical nanopores. The resulting porous alumina
makes an ideal mask for deposition of metallic or semiconducting substrates
to form devices such as nanowires or quantum dots. In this talk I will discuss
the anodization process and its implementation for the purposes of nanofabrication.
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